摘要:
在实际应用中,高频等离子体发生器感应螺管的高度一般与螺管的直径大小相近,因此在高频等离子体理论计算中螺管端部对等离子体电磁场的影响不容忽视.本文在等离子体为均匀电导率、无限长直圆柱的假设下,求解了它在有限长分离螺管中的电磁场分布,得到一些新的结果.指出,等离子体轴心处的磁场与空心螺管轴心处的有很大不同,甚至会出现逆向磁场;而在等离子体半径处的磁感应强度值仅稍大于空心螺管时的值,且其相位差与空心螺管时的也相差甚微.应用此处的空心螺管电磁场作为高频等离子体计算中电磁场的边值条件与实际更为接近.
Abstract:
In practical applications the diameter and height of the induction coil have the same order of magnitude, hence the end effect is unnegligible in Iff(high frequency) plasma theory.The present paper calculates the electromagnetic field under the assumption of infinite plasma column with uniform conductivity.The results show that the magnetic induction differs greatly from that in vacuum case at axis, and even the direction is reversed in some cases.In contrast, the difference is not large at plasma surface, and the,phase lag between B and E there changes little, either.Hence, the EM field at the surface in vacuum case can be more adequately applied as boundary condition in HF plasma computation.
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