Effects of Structure Parameters on Dynamic Performances of Electrostatic Drive Micro-Machined Gyroscopes

LI Xinye; WANG Yaxue; ZHANG Huabiao; ZHANG Lijuan; YU Tao

doi:10.21656/1000-0887.410316

Volume 42 Issue 12

Dec. 2021

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Article Navigation > Applied Mathematics and Mechanics > 2021 > 42(12): 1248-1257

LI Xinye, WANG Yaxue, ZHANG Huabiao, ZHANG Lijuan, YU Tao. Effects of Structure Parameters on Dynamic Performances of Electrostatic Drive Micro-Machined Gyroscopes[J]. Applied Mathematics and Mechanics, 2021, 42(12): 1248-1257. doi: 10.21656/1000-0887.410316

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Effects of Structure Parameters on Dynamic Performances of Electrostatic Drive Micro-Machined Gyroscopes

doi: 10.21656/1000-0887.410316

1.
School of Mechanical Engineering, Hebei University of Technology, Tianjin 300401, P.R.China
2.
School of Mechanical Engineering, Tianjin University of Commerce, Tianjin 300134, P.R.China
3.
School of Automotive & Transportation, Tianjin University of Technology and Education, Tianjin 300222, P.R.China

Received Date: 2020-10-19
Accepted Date: 2021-03-31
Rev Recd Date: 2021-01-27
Publish Date: 2021-12-01

Abstract

Abstract

In view of the cubic nonlinear stiffness and the nonlinear electrostatic force in fraction form, a 2DOF model was analyzed with the harmonic balance method and the residue theorem, and the effects of structure parameters on dynamic performances of micro-machined gyroscopes were studied. The variations of the capacitance with the driving force frequency and the carrier angular velocity were obtained for different thicknesses and gaps of driving electrode comb teeth, different electrode plate areas and different detecting electrode gaps. In addition, the variations of sensitivity and nonlinearity with these structure parameters were also presented. It is found that, the variation curves of the detection capacitance with the driving force frequency show obvious nonlinear characteristics. In other words, the 2nd peak leans rightward, which results in jumping. The effects of thicknesses and gaps of driving electrode comb teeth, and gaps between detecting electrode plates on the variation curves of the capacitance with the carrier angular velocity are much greater than those of detecting electrode plate areas. The variations of sensitivity and nonlinearity with thicknesses and gaps of driving electrode comb teeth and detecting electrode plate areas, are approximately linear, however, those with gaps between detecting electrode plates are nonlinear.
- micro-machined gyroscope,
- cubic nonlinear stiffness,
- nonlinear electrostatic force in fraction form,
- periodic response,
- sensitivity analysis,
- nonlinearity analysis

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References(19)

References

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